In this particular paper, the new lapping slurry and sharpening slurry are released. Along with the deliquescence diploma of CLBO is fallen to most affordable. A new Doing the job technologies is additionally adopted. Immediately after tough sharpening, the focus of ultra-precision sharpening slurry is improved adequately. So does the ultra-precision sharpening pace, along with the wiping speed is quicker compared to deliquescence pace. The CLBO crystal surface area roughness can obtain 1nm and retain the area quality nicely. Access by your institution
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For instance, The existing concave OC could get replaced by a aircraft mirror which could mitigate the power density to the area of M1 as well as diamond. Also, making use of higher destruction threshold coatings for M1 and diamond would also Enhance the output power with no damages. Then, the NIR laser in the 2nd Stokes wavelength can be substantial plenty of, and its very good beam high-quality, to generate the final DUV laser at 193 nm by using a superior normal electricity.
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Both the 1040 nm and 1078 nm laser originate from one particular dual-wavelength Yb-doped fiber laser. Every laser is amplified by levels of fiber amplifier and Yb-doped resources amplifier, respectively.
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Tunable ultraviolet laser resource dependant on solid-point out dye laser technological know-how and CsLiB6O10 harmonic generation
The conversion performance from fundamental NIR to DUV is from five% to 36% based on the documented brings about Table 1. Expanding the conversion performance will lessen the burden on the look and set up of the fundamental laser amplifier along with the electric electric power use. A superb beam excellent of the basic laser will also add to the growing on the conversion effectiveness and also the suitable electricity depth with the NIR and inexperienced laser in the SHG and FHG process, respectively. The highest conversion efficiencies from NIR to green and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and all-around fifty%, respectively [12], which corresponds towards the conversion efficiency of 35% from essential to DUV.
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